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Digitimes September 10, 2026 By Charlene Chen neutral

Spirox TGV inspection capable of scanning entire substrate in 20 minutes

AI / LLMSemiconductorsMemoryManufacturingSupply Chain
As advanced packaging moves toward higher-density stacking, demand is rising for glass through-glass via (TGV) and through-silicon via (TSV) inspection, while glass core substrates are steadily shifting from technology validation to mass production. Spirox chairman Peter Chin said the company has entered advanced packaging inspection with nonlinear optical technology, with TGV aperture sizes now at 4μm and 3μm still under validation, while materials, foundry, memory and packaging companies in Taiwan, Japan, the US and South Korea have already sent samples for testing.
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