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Tom's Hardware September 10, 2026 By Anton Shilov neutral

TSMC, Samsung, and Intel shore up support with ASML to deploy larger High-NA EUV photomasks — 6×12-inch photomask transition may take years despite unified effort

TSMCIntelSamsungASMLManufacturing
ASML, Intel, Samsung, and TSMC back development of 6×12-inch to build large processors using High-NA EUV lithography systems without stitching.
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