Gigaphoton Develops Gas Recycling System for ArF Excimer Lasers
Gigaphoton Inc. (Head Office: Oyama, Tochigi; President and CEO: Tatsuo Enami), a manufacturer of lightsources for semiconductor lithography, announced that it developed hTGM for ArF, the on-site neon gas recycling system for ArF excimer lasers. ArF lithography plays a critical role in the mass production of advanced semiconductors. Stable laser operation and the effective use … <a href="https://www.eejournal.com/industry_news/gigaphoton-develops-gas-recycling-system-for-arf-excimer-lasers/" class="more-link">Read More →<span class="screen-reader-text"> "Gigaphoton Develops Gas Recycling System for ArF Excimer Lasers"</span></a>
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