Beyond Lithography: 3D Scaling Puts New Demands on Materials

<p>ASM International shows how building increasingly complex 3D devices requires advances in materials and processes.</p> <p>The post <a href="https://www.eetimes.com/beyond-lithography-3d-scaling-puts-new-demands-on-materials/">Beyond Lithography: 3D Scaling Puts New Demands on Materials</a> appeared first on <a href="https://www.eetimes.com">EE Times</a>.</p>