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Semiconductor Engineering October 22, 2026 By Germain Fenger neutral

Beyond The EPE Budget: Building The Next Generation Of Computational Lithography

AI / LLMSemiconductors
<p>Why better models, richer metrology, explainable AI, and cross-industry collaboration must come together to extend semiconductor scaling.</p> <p>The post <a href="https://semiengineering.com/beyond-the-epe-budget-building-the-next-generation-of-computational-lithography/">Beyond The EPE Budget: Building The Next Generation Of Computational Lithography</a> appeared first on <a href="https://semiengineering.com">Semiconductor Engineering</a>.</p>
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