100% Bearing Free: Maglev Enables 6-DOF with Zero Contact, Applications in Hybrid Bonding, Wafer Metrology
<p>Three technology demonstrators, a 400mm linear stage, a rotary wafer stage, and a picometer-class AFM scanner, correct motion errors electronically with no bearing contact, lubrication, or wear SHREWSBURY, Mass., Nov. 3, 2026 /PRNewswire/ -- PI (Physik Instrumente) displayed a variety of...</p>
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