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Digitimes November 11, 2026 By DIGITIMES positive

Canon to launch KrF lithography scanner rated at 400 wafers per hour in December

AI / LLMSemiconductorsMemoryManufacturingSupply Chain
Canon Inc. said on November 10, 2026, that it will launch the FPA-6400ES6a, a krypton fluoride (KrF) scanner for manufacturing memory and logic semiconductors, in early December 2026. The company's release gave no exact launch date, price, or shipment volume.
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