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Digitimes September 10, 2026 By Sherri Wang neutral

Analysis: China chases EUV as chipmakers move to High-NA

TSMCIntelSamsungSK HynixSemiconductorsMemoryManufacturingSupply ChainData Center
The extreme ultraviolet (EUV) lithography race is splitting into two tracks. Intel has moved High-NA EUV into production, Samsung Electronics and SK Hynix are targeting DRAM production in 2028, and TSMC plans to introduce the technology into advanced-node high-volume manufacturing in 2030.
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